Deposition of superconducting niobium films for RF cavities by means of UHV cathodic Arc
نویسندگان
چکیده
منابع مشابه
UHV Arc Deposition of Superconducting Niobium Films
Recently the UHV arc technology was proposed as a possible alternative for depositing thin superconducting films of pure niobium on the inside surface of RF cavities for particle accelerators. The paper describes status of research on deposition of superconducting films for RF accelerating cavities. New UHV arc based devices with planar and cylindrical niobium cathodes are presented. The main r...
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The paper shows that high–quality super-conducting Nb films can be deposited by means of arc discharges under ultra–high vacuum conditions. The critical temperature Tc of Nb–films obtained with a planar cathodic arc Ultra High Vacuum (UHV) system, is very close to that of pure bulk niobium Tc = 9.26 K and the transition to super–conducting state is very narrow. The films have higher Residual Re...
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A systematic study is presented on the superconductivity (sc) parameters of the ultrapure niobium used for the fabrication of the nine-cell 1.3 GHz cavities for the linear collider project TESLA. Cylindrical Nb samples have been subjected to the same surface treatments that are applied to the TESLA cavities: buffered chemical polishing (BCP), electrolytic polishing (EP), low-temperature bakeout...
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The filtered cathodic vacuum arc technique was employed to deposit magnetic films such as FeNi on silicon substrate. Using the normal cathode design, tetrahedral amorphous carbon and metals films can be deposited. If a magnetic target is used, the arc spot always preferably moves to the edge of the target and then extinguishes. Therefore, the arc is not stable and no film can be deposited. A ca...
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Zirconium oxide thin films were fabricated on silicon wafers using a filtered cathodic arc system in concert with oxygen plasma. The structure and phase composition of the zirconium oxide thin films were characterized by atomic force microscopy (AFM), X-ray diffraction (XRD), Rutherford backscattering spectrometry (RBS), and transmission electron microscopy (TEM). The bioactivity was assessed b...
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ژورنال
عنوان ژورنال: Vacuum
سال: 2006
ISSN: 0042-207X
DOI: 10.1016/j.vacuum.2006.01.057